The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 11, 2018
Filed:
Apr. 28, 2015
Horiba Jobin Yvon Sas, Longjumeau, FR;
Simon Richard, Palaiseau, FR;
Jean-Paul Gaston, Vert le Grand, FR;
Olivier Acher, Gif-sur-Yvette, FR;
Patrick Chapon, Villebon sur Yvette, FR;
Horiba Jobin Yvon SAS, Longjumeau, FR;
Abstract
A glow discharge spectrometry system includes a glow discharge lamp suitable for receiving a solid sample () and forming a glow discharge etching plasma (). The system () for measuring in situ the depth of the erosion crater generated by etching of the sample () includes an optical separator (), optical elements () suitable for directing a first incident beam () toward a first zone () of the sample, the first zone being exposed to the etching plasma, and a second incident beam () toward a second zone () of the same side of the sample, the second zone being protected from the etching plasma, respectively, and an optical recombining device () suitable for forming an interferometric beam () so as to determine the depth (d) of the erosion crater.