The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 11, 2018

Filed:

Oct. 27, 2016
Applicant:

Seiko Epson Corporation, Tokyo, JP;

Inventors:

Masahiro Ishii, Higashiomi, JP;

Keiichi Yamaguchi, Ina, JP;

Takayuki Kikuchi, Chino, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01C 19/5614 (2012.01); H01L 41/113 (2006.01); G01C 19/56 (2012.01);
U.S. Cl.
CPC ...
G01C 19/56 (2013.01); G01C 19/5614 (2013.01); H01L 41/1132 (2013.01);
Abstract

A vibrator element has a detection arm that performs a drive vibration in a Z-axis direction, and performs a detection vibration in an X-axis direction when an angular velocity is applied thereto The vibrator element also has first, second, third, and fourth electrode portions and first, second, third, and fourth ground electrode portions provided on a detection arm. Further, a signal generated between the first electrode portion and the first ground electrode portion and a signal generated between the second electrode portion and the second ground electrode portion are in opposite phase in a drive vibration and in phase in a detection vibration. Furthermore, a signal generated between the third electrode portion and the third ground electrode portion and a signal generated between the fourth electrode portion and the fourth ground electrode portion are in opposite phase in the drive vibration and in phase in the detection vibration.


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