The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 04, 2018
Filed:
Mar. 02, 2017
Applicant:
Coherent Lasersystems Gmbh & Co. KG, Göttingen, DE;
Inventors:
Assignee:
COHERENT LASERSYSTEMS GMBH & CO. KG, Göttingen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01S 3/225 (2006.01); H01S 3/032 (2006.01); H01S 3/097 (2006.01);
U.S. Cl.
CPC ...
H01S 3/225 (2013.01); H01S 3/032 (2013.01); H01S 3/097 (2013.01);
Abstract
A xenon chloride (XeCl) excimer laser includes a lasing-gas mixture including a buffer gas, a noble gas, a halogen-donating gas, and deuterium. The deuterium is present in a concentration greater than about 10 parts-per-million.