The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 04, 2018

Filed:

Jun. 27, 2014
Applicant:

Kyocera Corporation, Kyoto-shi, Kyoto, JP;

Inventor:

Masahiro Sato, Kirishima, JP;

Assignee:

KYOCERA CORPORATION, Kyoto-Shi, Kyoto, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); H01L 21/683 (2006.01); H01L 21/687 (2006.01); C30B 25/18 (2006.01); C30B 29/06 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67103 (2013.01); C30B 25/18 (2013.01); C30B 29/06 (2013.01); H01L 21/67109 (2013.01); H01L 21/67288 (2013.01); H01L 21/6835 (2013.01); H01L 21/68757 (2013.01);
Abstract

A sample holder of the present invention includes a base body formed of ceramic substrates laminated to each other and having an upper surface functioning as a sample holding surface. In this sample holder, the base body includes a first ceramic substrate including a flow path for a heating medium and a second ceramic substrate which is laminated at an upper side than the first ceramic substrate, which has an upper surface functioning as the sample holding surface, and which is formed of the same material as that of the first ceramic substrate, and the average grain diameter of ceramic grains forming the second ceramic substrate is smaller than that of ceramic grains forming the first ceramic substrate.


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