The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 04, 2018

Filed:

Sep. 30, 2014
Applicant:

Beijing Naura Microelectronics Equipment Co., Ltd., Beijing, CN;

Inventors:

Shuai Yang, Beijing, CN;

Jinwei Dong, Beijing, CN;

Yanxiao Lu, Beijing, CN;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01K 7/02 (2006.01); G01K 1/14 (2006.01);
U.S. Cl.
CPC ...
G01K 7/02 (2013.01); G01K 1/14 (2013.01);
Abstract

A thermocouple fixing device and a temperature measuring apparatus including a fixing joint, a sealing sleeve, a clamping piece and a locking nut sequentially sleeved outside the outer cover of the thermocouple is disclosed. The inside end of the fixing joint is fixed on the side wall of the vacuum generation chamber, the outside end of the fixing joint abuts on one end of the sealing sleeve; the two sides of the clamping piece abut on the other end of the sealing sleeve and the inside end of the locking nut, respectively; the internal threads of the locking nut are meshed with the external threads of the fixing joint; the clamping piece has a clamping element and a through hole for clamping the outer over of the thermocouple.


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