The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 04, 2018

Filed:

Mar. 26, 2013
Applicant:

Unitex Co., Ltd, Gyeonggi-do, KR;

Inventors:

Myung Gi Lee, Gyeonggi-do, KR;

Yong Eui Lee, Gyeonggi-do, KR;

Un Jung Kim, Gyeonggi-do, KR;

Assignee:

UNITEX CO., LTD., Gyeonggi-do, KR;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B01F 3/02 (2006.01); B01F 5/00 (2006.01); C23C 14/22 (2006.01); C23C 14/24 (2006.01); C23C 16/44 (2006.01); C23C 16/448 (2006.01); C23C 16/455 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45512 (2013.01); B01F 3/02 (2013.01); B01F 5/00 (2013.01); C23C 14/228 (2013.01); C23C 14/243 (2013.01); C23C 16/4402 (2013.01); C23C 16/4481 (2013.01); C23C 16/45502 (2013.01);
Abstract

The present invention relates to a source container and to a vapor-deposition reactor. The source container according to one embodiment of the present invention comprises: a container comprising an inner wall for delimiting a first space for holing a source material, and a second space which is adjacent to the first space and is for the mixing of vapor emitted from the source material and a carrier gas taken into the inside thereof; a carrier gas inflow pathway which connects the outside of the container second space; a mixed gas discharge pathway which connects the outside of the container and the second space; and a flow-limiting member which expands inside the second space, and provides a first flow barrier surface between the inflow port and the discharge port.


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