The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 04, 2018

Filed:

Aug. 29, 2016
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Joy Cheng, Taipei, TW;

Anindarupa Chunder, San Jose, CA (US);

Daniel P. Sanders, San Jose, CA (US);

Ankit Vora, San Jose, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C08F 212/14 (2006.01); C08F 220/24 (2006.01); C08F 220/68 (2006.01); C09D 169/00 (2006.01); C09D 133/16 (2006.01); C09D 127/12 (2006.01); C09D 125/08 (2006.01); C08L 69/00 (2006.01); C08L 25/08 (2006.01); C08G 64/18 (2006.01); B81C 1/00 (2006.01); C08F 12/20 (2006.01); C08F 12/22 (2006.01); C08F 212/08 (2006.01); C09D 125/18 (2006.01); C08F 220/04 (2006.01); H01L 21/027 (2006.01);
U.S. Cl.
CPC ...
C08F 220/68 (2013.01); B81C 1/00523 (2013.01); C08F 12/20 (2013.01); C08F 12/22 (2013.01); C08F 212/08 (2013.01); C08F 212/14 (2013.01); C08F 220/04 (2013.01); C08G 64/18 (2013.01); C08G 64/183 (2013.01); C08L 25/08 (2013.01); C08L 69/00 (2013.01); C09D 125/08 (2013.01); C09D 125/18 (2013.01); C09D 127/12 (2013.01); C09D 133/16 (2013.01); C09D 169/00 (2013.01); H01L 21/0271 (2013.01); B81C 2201/0149 (2013.01); C08F 2438/01 (2013.01);
Abstract

A film layer comprising a high-chi (χ) block copolymer for self-assembly and a surface active polymer (SAP) was prepared on a substrate surface that was neutral wetting to the domains of the self-assembled block copolymer. The block copolymer comprises at least one polycarbonate block and at least one other block (e.g., a styrene-based block). The SAP comprises a hydrophobic fluorinated first repeat unit and a non-fluorinated second repeat unit bearing at least one pendent OH group present as an alcohol or acid (e.g., carboxylic acid). The film layer, whose top surface has contact with an atmosphere, self-assembles to form a lamellar or cylindrical domain pattern having perpendicular orientation with respect to the underlying surface. Other morphologies (e.g., islands and holes of height 1.0Lo) were obtained with films lacking the SAP. The SAP is preferentially miscible with, and lowers the surface energy of, the domain comprising the polycarbonate block.


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