The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 04, 2018
Filed:
Mar. 11, 2016
Applicant:
Screen Holdings Co., Ltd., Kyoto, JP;
Inventors:
Hiroaki Kitagawa, Kyoto, JP;
Katsuhiko Miya, Kyoto, JP;
Assignee:
SCREEN Holdings Co., Ltd., , JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B08B 3/10 (2006.01); H01L 21/02 (2006.01); H01L 21/67 (2006.01); B08B 7/00 (2006.01);
U.S. Cl.
CPC ...
B08B 3/10 (2013.01); B08B 7/0014 (2013.01); B08B 7/0064 (2013.01); B08B 7/0092 (2013.01); H01L 21/02041 (2013.01); H01L 21/02052 (2013.01); H01L 21/6704 (2013.01); H01L 21/67028 (2013.01); H01L 21/67109 (2013.01);
Abstract
A solidified body forming step includes: a first step of landing a processing surface of a cooling member on a liquid film to solidify the liquid to be solidified located in an area sandwiched between an upper surface and the processing surface; and a second step of releasing the processing surface from the solidified area solidified in the first step. The processing surface has a lower temperature than a freezing point of the liquid to be solidified. Adhesion between the solidified area and the processing surface is smaller than that between the solidified area and the upper surface.