The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 28, 2018
Filed:
Dec. 22, 2014
Kawasaki Jukogyo Kabushiki Kaisha, Kobe-shi, Hyogo, JP;
KAWASAKI JUKOGYO KABUSHIKI KAISHA, Kobe-shi, JP;
Abstract
An end effector device is provided with a hand; a plurality of holding portions that are provided to the hand, and that hold a plurality of semiconductor wafers such that the plurality of semiconductor wafers are arranged at intervals in the vertical direction in a parallel attitude; a single detector that is arranged outside the plurality of semiconductor wafers viewed from the vertical direction, and that is configured to be able to detect the presence of each one of the semiconductor wafers, opposing a peripheral portion of the semiconductor wafer; and a detector moving mechanism that moves the single detector relative to the plurality of semiconductor wafers in the vertical direction such that the single detector opposes the peripheral portion of every semiconductor wafer.