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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10062589 B1

PDFFull Text
Date of Patent:
Aug. 28, 2018

Filed:

Aug. 09, 2017

Front opening ring pod

Applicant:

Lam Research Corporation, Fremont, CA (US);

Inventors:

Scott Wong, Sunnyvale, CA (US);

Damon Tyrone Genetti, Livermore, CA (US);

Derek John Witkowicki, Newark, CA (US);

Alex Paterson, San Jose, CA (US);

Richard H. Gould, Fremont, CA (US);

Austin Ngo, San Jose, CA (US);

Marc Estoque, San Jose, CA (US);

Assignee:

Lam Research Corporation, Fremont, CA (US);

Attorney:

Martine Penilla Group, LLP

Primary Examiner:

Bryon Gehman

Int. Cl.
CPC ...
H01L 21/67 (2006.01); H01L 21/687 (2006.01); H01L 21/677 (2006.01); H01L 21/673 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67167 (2013.01); H01L 21/6719 (2013.01); H01L 21/6732 (2013.01); H01L 21/67196 (2013.01); H01L 21/67201 (2013.01); H01L 21/67303 (2013.01); H01L 21/67369 (2013.01); H01L 21/67379 (2013.01); H01L 21/67383 (2013.01); H01L 21/67386 (2013.01); H01L 21/67389 (2013.01); H01L 21/67742 (2013.01); H01L 21/68707 (2013.01);
Abstract

A pod for exchanging consumable parts with a process module includes a base plate having a front side, a back side, and first and second lateral sides. A first support column is disposed on the first lateral side proximal to the front side. A second support column is disposed on the second lateral side proximal to the front side. A third support column is disposed on the first lateral side proximal to back side and a fourth support column is disposed on the second lateral side proximal to the back side. Each of the support columns includes a plurality of support fingers distributed lengthwise and directed inward. A first hard stop column is disposed parallel to the third support column and a second hard stop column is disposed parallel to the fourth support column. A shell structure connected to the base plate is configured to enclose the first, second third and fourth support columns, top plate and first and second hard stop columns and includes a front opening disposed on the front side of the base plate. A door is mated to the front opening and includes retention assembly for securing consumable parts in the pod, when received in the pod.

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