The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 28, 2018
Filed:
Mar. 09, 2016
Lyncean Technologies, Inc., Fremont, CA (US);
Ronald D. Ruth, Stanford, CA (US);
Roderick J. Loewen, Redwood City, CA (US);
Martin A. Gifford, Palo Alto, CA (US);
Lyncean Technologies, Inc., Fremont, CA (US);
Abstract
The manufactured structure is illuminated with an x-ray beam. The manufactured structure is positioned at a selected grazing angle and a selected rotation angle with respect to the x-ray beam. The selected rotation angle has been selected to enhance in-plane diffraction of reflections of the x-ray beam by the manufactured structure. A grazing in-plane diffraction beam produced by interference with the periodic feature is detected. A property of the grazing in-plane diffraction beam is determined by the critical dimension.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile