The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 28, 2018
Filed:
Jul. 13, 2016
Applicant:
Continental Automotive Systems, Inc., Auburn Hills, MI (US);
Inventors:
Shiuh-Hui Steven Chen, Lake Zurich, IL (US);
Jen-Huang Albert Chiou, Libertyville, IL (US);
Robert C. Kosberg, Grayslake, IL (US);
Daniel Roy Empen, Lake Villa, IL (US);
Assignee:
Continental Automotive Systems, Inc., Auburn Hills, MI (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01L 9/00 (2006.01); G01L 9/06 (2006.01); G01L 19/00 (2006.01); G01L 19/04 (2006.01); G01L 19/14 (2006.01); B81B 7/00 (2006.01); G01L 19/02 (2006.01);
U.S. Cl.
CPC ...
G01L 19/146 (2013.01); B81B 7/0045 (2013.01); G01L 9/0054 (2013.01); G01L 9/0055 (2013.01); G01L 9/06 (2013.01); G01L 19/0046 (2013.01); G01L 19/0069 (2013.01); G01L 19/02 (2013.01); G01L 19/04 (2013.01); G01L 19/147 (2013.01); G01L 19/148 (2013.01); H01L 2224/48091 (2013.01);
Abstract
Suspending a microelectromechanical system (MEMS) pressure sensing element inside a cavity using spring-like corrugations or serpentine crenellations, reduces thermally-mismatched mechanical stress on the sensing element. Overlaying the spring-like structures and the sensing element with a gel further reduces thermally-mismatched stress and vibrational dynamic stress.