The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 28, 2018
Filed:
Aug. 04, 2014
Applicant:
Merck Patent Gmbh, Darmstadt, DE;
Inventors:
Klaus Bonrad, Alsbach-Haehnlein, DE;
Joerg Schneider, Seeheim-Jugenheim, DE;
Rudolf Hoffman, Darmstadt, DE;
Mareiki Kaloumenos, Darmstadt, DE;
Assignee:
MERCK PATENT GMBH, Darmstadt, DE;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C07F 9/66 (2006.01); C23C 18/12 (2006.01); C07F 3/00 (2006.01); C07F 5/00 (2006.01); C07F 7/00 (2006.01); C07F 7/22 (2006.01); C07F 3/06 (2006.01); H01G 4/10 (2006.01); H01G 4/33 (2006.01); H01L 21/02 (2006.01); H01L 21/445 (2006.01); H01L 29/45 (2006.01); H01L 29/66 (2006.01); H01L 29/786 (2006.01);
U.S. Cl.
CPC ...
C23C 18/1216 (2013.01); C07F 3/003 (2013.01); C07F 3/06 (2013.01); C07F 5/003 (2013.01); C07F 7/006 (2013.01); C07F 7/2204 (2013.01); C07F 7/2228 (2013.01); C23C 18/1291 (2013.01); H01G 4/10 (2013.01); H01G 4/33 (2013.01); H01L 21/02554 (2013.01); H01L 21/02565 (2013.01); H01L 21/02628 (2013.01); H01L 21/02664 (2013.01); H01L 21/445 (2013.01); H01L 29/45 (2013.01); H01L 29/66969 (2013.01); H01L 29/7869 (2013.01);
Abstract
The present invention relates to novel precursors in the form of metal complexes with 2-substituted 1,3-diketones and to a process for the preparation thereof. The invention furthermore relates to the use thereof for the production of thin metal-oxide layers. The latter are constituents in a very wide variety of electronic components and devices having various functions.