The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 21, 2018

Filed:

Sep. 30, 2016
Applicant:

Beijing Naura Microelectronics Equipment Co., Ltd., Beijing, CN;

Inventor:

Dong Xu, Beijing, CN;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G05B 19/04 (2006.01); H01L 21/677 (2006.01); H01L 21/67 (2006.01); H01L 21/68 (2006.01); B25J 9/16 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67766 (2013.01); B25J 9/1692 (2013.01); H01L 21/67259 (2013.01); H01L 21/68 (2013.01);
Abstract

A robot fork calibration method and system is provided. At least three non-linear arranged lower sensors are provided on a bottom surface of the fork to detect distances to a fixed detection point. The fixed detection point and a horizontal plane of the detection point define a reference coordinate system. Spatial coordinates of the lower sensors in the reference coordinate system are calculated and a plane equation as well as a tilted angle of the fork are obtained according to the spatial coordinates. Therefore, the height of the fork can be calibrated according to the Z axis coordinates of the lower sensors and the levelness of the fork can be calibrated according to the tilted angle.


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