The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 21, 2018

Filed:

Sep. 06, 2017
Applicant:

Canon Anelva Corporation, Kawasaki-shi, Kanagawa-ken, JP;

Inventors:

Masao Sasaki, Hachioji, JP;

Kazutoshi Yoshibayashi, Kawasaki, JP;

Kenji Sato, Koganei, JP;

Kenzou Murata, Tachikawa, JP;

Assignee:

Canon Anelva Corporation, Kawasaki-shi, Kanagawa-ken, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); H05B 3/24 (2006.01); H01L 21/324 (2006.01); H01L 21/22 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67098 (2013.01); H01L 21/22 (2013.01); H01L 21/324 (2013.01); H05B 3/24 (2013.01);
Abstract

A heating apparatus includes a heater, an electron reflection plate, a filament arranged between the heater and the electron reflection plate, a heating power supply configured to supply an AC voltage between a first terminal and a second terminal of the filament to emit thermoelectrons from the filament, an acceleration power supply configured to supply an acceleration voltage between the filament and the heater, and a resistor arranged so as to form a path which connects the electron reflection plate and the heating power supply.


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