The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 21, 2018
Filed:
Jun. 22, 2017
SK Hynix Inc., Gyeonggi-do, KR;
Hyun Seong Kim, Gyeonggi-do, KR;
SK Hynix Inc., Gyeonggi-do, KR;
Abstract
There is provided a method for forming fine patterns. The method includes forming a pattern divider on an underlying layer, forming a mask layer on the underlying layer to cover the pattern divider, forming an opening pattern that vertically penetrates the mask layer to expose a portion of the pattern divider and intersects the exposed portion of the pattern divider, and selectively removing portions of the underlying layer exposed by the opening pattern of the mask layer to form a couple of opening sub-patterns.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile