The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 21, 2018

Filed:

Mar. 15, 2013
Applicant:

Vapor Technologies, Inc., Longmont, CO (US);

Inventors:

Vladimir Gorokhovsky, San Antonio, TX (US);

William Grant, Lafayette, CO (US);

Edward Taylor, Erie, CO (US);

David Humenik, Longmont, CO (US);

Assignee:

VAPOR TECHNOLOGIES, INC., Longmont, CO (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/34 (2006.01); C23C 14/32 (2006.01); C23C 14/35 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3438 (2013.01); C23C 14/32 (2013.01); C23C 14/325 (2013.01); C23C 14/35 (2013.01); C23C 14/355 (2013.01); H01J 37/32055 (2013.01); H01J 37/3405 (2013.01); H01J 37/3417 (2013.01); H01J 37/32357 (2013.01); H01J 37/34 (2013.01);
Abstract

A coating system includes a vacuum chamber and a coating assembly. The coating assembly includes a vapor source, a substrate holder, a remote anode electrically coupled to the cathode target, and a cathode chamber assembly. The cathode chamber assembly includes a cathode target, an optional primary anode and a shield which isolates the cathode target from the vacuum chamber. The shield defines an opening for transmitting an electron emission current of a remote arc discharge from the cathode target to the remote anode that streams along the target face long dimension. A primary power supply is connected between the cathode target and the primary anode while a secondary power supply is connected between the cathode target and the remote anode. Characteristically, a linear remote anode dimension and a vapor source short dimension are parallel to a dimension in which an arc spot is steered along the cathode target.


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