The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 21, 2018
Filed:
Mar. 01, 2016
Applicant:
Toshiba Memory Corporation, Minato-Ku, Tokyo, JP;
Inventor:
Mitsutoshi Nakamura, Kawasaki Kanagawa, JP;
Assignee:
TOSHIBA MEMORY CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06F 17/50 (2006.01);
U.S. Cl.
CPC ...
G06F 17/5009 (2013.01); G06F 17/5018 (2013.01); G06F 17/5045 (2013.01); G06F 2217/12 (2013.01); G06F 2217/16 (2013.01); Y02P 90/265 (2015.11);
Abstract
According to an embodiment, a process simulator has a layout processing unit to extract vertex coordinates of a first graphic of a layout of a semiconductor device described in a layout file used for a simulation, an initial mesh generation unit to generate a first initial mesh passing through the vertex coordinates in a plane direction of the layout, and a simulator unit to execute a process simulation of the semiconductor device based on simulation data in which a process flow of the semiconductor device is described, the layout, and the first initial mesh.