logo

For the Inventor, By the Inventor

The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10054856 B1

PDFFull Text
Date of Patent:
Aug. 21, 2018

Filed:

Apr. 22, 2015

Exposure method, manufacturing method of device, and thin film sheet

Applicant:

Toshiba Memory Corporation, Minato-ku, JP;

Inventors:

Kentaro Matsunaga, Yokkaichi, JP;

Kazuhiro Segawa, Kuwana, JP;

Assignee:

TOSHIBA MEMORY CORPORATION, Minato-ku, JP;

Attorney:

Oblon, McClelland, Maier & Neustadt, L.L.P.

Primary Examiner:

Daborah Chacko Davis

Int. Cl.
CPC ...
H01L 21/302 (2006.01); G03F 7/26 (2006.01); H01L 21/324 (2006.01); H01L 21/683 (2006.01); G03F 7/20 (2006.01); H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
G03F 7/26 (2013.01); G03F 7/70783 (2013.01); H01L 21/3247 (2013.01); H01L 21/6838 (2013.01); H01L 22/12 (2013.01);
Abstract

According to one embodiment, there is provided an exposure method. The method includes attaching a thin film sheet thermally shrinkable onto a rear face of a wafer. The method includes heating the wafer provided with the thin film sheet attached thereon, and deforming the wafer into a shape projecting on a front face side of the wafer. The method includes fixing the deformed wafer onto a stage by vacuum suction holding from a rear face side of the wafer. The method includes performing exposure to the fixed wafer.

Find Patent Forward Citations

Matsunaga, Kentaro. (2018). Exposure method, manufacturing method of device, and thin film sheet (U.S. Patent No. 10054856). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10054856

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…