The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 21, 2018

Filed:

Nov. 27, 2012
Applicant:

Keysight Technologies, Inc., Minneapolis, MN (US);

Inventor:

Christopher Ryan Moon, Cupertino, CA (US);

Assignee:

Keysight Technologies, Inc., Santa Rosa, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01Q 10/06 (2010.01); G01Q 60/32 (2010.01);
U.S. Cl.
CPC ...
G01Q 10/065 (2013.01); G01Q 60/32 (2013.01);
Abstract

A method is provided for controlling an FM-AFM including a cantilever having a resonant frequency and an excitation system configured to oscillate the cantilever in response to a drive signal. The method includes determining latency of the excitation system; receiving a deflection signal indicating a deflection of a cantilever tip; mixing the deflection signal with a first sine signal output by a PLL indicating a frequency shift of a frequency response of the cantilever; measuring the frequency shift in response to the drive signal; determining spurious phase of the cantilever based on the determined latency, the resonant frequency of the cantilever, and the measured frequency shift; providing a second sine signal having a phase that is advanced by the determined spurious phase to preemptively compensate for subsequent spurious phase of the cantilever; and driving the excitation system using the second sine signal with an adjusted amplitude as the drive signal.


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