The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 21, 2018
Filed:
Jul. 27, 2016
Hitachi High-tech Science Corporation, Tokyo, JP;
Yoshiki Matoba, Tokyo, JP;
Akihiro Takeda, Tokyo, JP;
Shingo Tsuboi, Tokyo, JP;
Toshihiro Sakai, Tokyo, JP;
HITACHI HIGH-TECH SCIENCE CORPORATION, Tokyo, JP;
Abstract
Disclosed are an X-ray transmission inspection apparatus and an inspection method using the same that are capable of preventing over-detection and erroneous detection of foreign matter even when variations in vertical position of the sample occur. The X-ray transmission inspection apparatus includes: an X-ray source () irradiating a sample with X-rays; a sample moving device () moving the sample S continuously to a predetermined direction while X-rays X are emitted from the X-ray source; a time delay integration sensor (TDI sensor) () provided opposed to the X-ray source based on the sample, and detecting the X-rays transmitted through the sample; a distance sensor () measuring a distance between the X-ray source and the sample; and a TDI controller () controlling the TDI sensor by changing a charge transfer speed of the TDI sensor () in real time based on variations in the distance measured by the distance sensor.