The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 21, 2018

Filed:

Sep. 26, 2016
Applicant:

Nikon Corporation, Tokyo, JP;

Inventors:

Fumihiro Dake, Kawasaki, JP;

Hiroki Yazawa, Yokohama, JP;

Assignee:

NIKON CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 21/64 (2006.01); G02B 21/00 (2006.01); G01N 21/63 (2006.01); G02B 21/08 (2006.01); G02B 21/16 (2006.01); G02B 21/36 (2006.01); G02F 1/11 (2006.01);
U.S. Cl.
CPC ...
G01N 21/6458 (2013.01); G01N 21/636 (2013.01); G02B 21/0076 (2013.01); G02B 21/0084 (2013.01); G02B 21/086 (2013.01); G02B 21/16 (2013.01); G02B 21/367 (2013.01); G02F 1/11 (2013.01); G01N 2201/0675 (2013.01); G01N 2201/0697 (2013.01);
Abstract

A super-resolution observation device includes an illumination optical system that focus a first illuminating light at optical frequency ωand a second illuminating light at optical frequency ωon a region of an observation object plane; a modulation unit that modulates a property of the first illuminating light heading toward the region at a modulation frequency f; and an extraction unit that extracts a component at the optical frequency ωor ωfrom a light generated in the region according to the first illuminating light and the second illuminating light, the component of which the property changes at a frequency higher than the modulation frequency f.


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