The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 21, 2018

Filed:

Jun. 22, 2015
Applicant:

Carl Zeiss Spectroscopy Gmgh, Jena, DE;

Inventors:

Jörg Margraf, Königsee-Rottenbach, DE;

Jens Mondry, Jena, DE;

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/55 (2014.01); G01J 3/02 (2006.01); G01N 21/47 (2006.01); G01N 21/27 (2006.01); G01N 21/86 (2006.01); G01J 3/50 (2006.01);
U.S. Cl.
CPC ...
G01J 3/0251 (2013.01); G01J 3/021 (2013.01); G01J 3/50 (2013.01); G01N 21/27 (2013.01); G01N 21/474 (2013.01); G01N 21/86 (2013.01); G01N 2021/4754 (2013.01); G01N 2021/8618 (2013.01); G01N 2201/065 (2013.01);
Abstract

The invention relates to a measuring arrangement for detecting an absolute reflection spectrum of a sample in a process for producing the sample. It comprises a light source for generating measurement light, a homogenizer for generating a uniform spatial illuminance distribution of the measurement light; a movable reflector and a receiver for collecting the measurement light reflected from the sample and/or the reflector. According to the invention, the reflector both for a reference measurement and for a sample measurement is positioned in an observation beam path and arranged on the same side of the sample as the light source in order to feed the reflected measurement light to the receiver.


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