The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 21, 2018
Filed:
Jul. 21, 2010
Toshiyuki Kimura, Tokyo, JP;
Toshiyuki Kimura, Tokyo, JP;
SUMITOMO HEAVY INDUSTRIES, LTD., Tokyo, JP;
Abstract
A cryopump pumps gas from a vacuum chamber in a vacuum apparatus performing vacuum processing. The cryopump comprises: a refrigerator; a cryopanel cooled by the refrigerator; and a controller configured to control an operating cycle of the refrigerator such that the cryopanel is controlled so as to have a target temperature. When an operating cycle of the refrigerator has reached a first determination reference, the controller monitors the operating cycle for a first determination period of time, and when the operating cycle has reached a second determination reference, which corresponds to a higher load than the first determination reference, the controller monitors a temperature of the cryopanel for a second determination period of time, which is shorter the first determination period of time.