The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 21, 2018
Filed:
Jul. 21, 2014
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Vijay D. Parkhe, San Jose, CA (US);
Kurt J Ahmann, San Jose, CA (US);
Matthew C Tsai, Cupertino, CA (US);
Steve Sansoni, Livermore, CA (US);
Assignee:
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/683 (2006.01); C23C 16/00 (2006.01); C23C 16/46 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
C23C 16/463 (2013.01); H01L 21/6831 (2013.01); H01L 21/6875 (2013.01); H01L 21/68757 (2013.01); Y10T 279/23 (2015.01);
Abstract
A cooling pedestal for supporting a substrate, comprises a support structure having cooling conduits to flow a fluid therethrough to cool the substrate, and a contact surface comprising a coating of a diamond-like carbon. The coating comprises (i) a coefficient of friction of less than about 0.3, (ii) an average surface roughness of less than about 0.4 micrometers, and (iii) a microhardness of at least about 8 GPa.