The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 21, 2018
Filed:
Nov. 26, 2014
Forschungszentrum Juelich Gmbh, Juelich, DE;
Andrew Paolo Cadiz Bedini, Aachen, DE;
Abstract
A method for polymerizing a composition including hydridosilanes and subsequently using the polymers to produce silicon containing layers, comprising the following steps: a) providing a substrate; b) providing a composition including at least one hydridosilane that is dissolved in at least one organic and/or inorganic solvent, or including at least one hydridosilane that is already present in liquid form without solvent, wherein the hydridosilanes comprise at least one linear and/or one branched hydridosilane of the general formula SiH, where n≥3, and/or a cyclic hydridosilane of the general formula SiH, where n≥3; c) polymerizing the composition from step b) by way of acoustic cavitation; and d) coating the surface of the substrate with reaction products from step c). A device for polymerizing a composition including hydridosilanes and subsequently using the polymers to produce silicon containing layers, comprising at least one reaction vessel () containing a composition that includes at least one hydridosilane that is dissolved in at least one organic and/or inorganic solvent, or at least one hydridosilane that is already present in liquid form without solvent, wherein the hydridosilanes comprise at least one linear and/or branched hydridosilane of the general formula SiH, where n≥3, and/or a cyclic hydridosilane of the general formula SiH, where n≥3, and/or containing the abovementioned hydridosilane solution or the pure liquid hydridosilane, to which at least monosilane and/or disilane and/or boron containing dopant and/or phosphorus containing dopant and/or a noble gas from the group Ar, He and/or nanoparticles and/or a polymerization initiator and/or a catalyst and/or surface tension modifying agents can be added, and an ultrasound source and/or a sound transducer () for generating acoustic cavitation and/or capillary waves, wherein the reaction vessel () has at least one closable opening (), the substrate () to be coated is disposed opposite the opening (), and the substrate () comprises a heating source () on the surface that faces away from the coating surface.