The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 21, 2018
Filed:
Aug. 15, 2016
Applicant:
Samsung Display Co., Ltd., Yongin-si, Gyeonggi-do, KR;
Inventor:
Katsushi Kishimoto, Seoul, KR;
Assignee:
SAMSUNG DISPLAY CO., LTD., Yongin-si, Gyeonggi-do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05D 1/02 (2006.01); H01L 51/56 (2006.01); B05D 1/00 (2006.01); H01L 51/00 (2006.01); B05D 3/04 (2006.01);
U.S. Cl.
CPC ...
B05D 1/60 (2013.01); B05D 3/0466 (2013.01); B05D 3/0473 (2013.01); H01L 51/0008 (2013.01); H01L 51/0026 (2013.01); H01L 51/56 (2013.01); H01L 2227/323 (2013.01);
Abstract
A method of manufacturing a film includes disposing a substrate under one side of a baffle plate in a film manufacturing space, the baffle plate having a plurality of through-holes, and spraying an inert gas toward the substrate through a plurality of nozzle tips branched from a gas distribution pipe that is disposed over an other side of the baffle plate such that the inert gas penetrates the baffle plate through the through-holes.