The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 14, 2018

Filed:

Feb. 24, 2017
Applicant:

Samsung Display Co., Ltd, Yongin-si, Gyeonggi-do, KR;

Inventors:

Jong-Oh Seo, Seoul, KR;

Dong-Min Lee, Yongin-si, KR;

Mee-Jae Kang, Suwon-si, KR;

Sang-Ho Jeon, Yongin-si, KR;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/12 (2006.01); G02B 27/09 (2006.01);
U.S. Cl.
CPC ...
H01L 27/1285 (2013.01); G02B 27/0927 (2013.01); G02B 27/0955 (2013.01); H01L 27/1222 (2013.01);
Abstract

A laser crystallization apparatus includes a laser generating module configured to generate a laser beam, an optical module configured to guide the laser beam, an annealing chamber comprising a stage on which a target substrate comprising an amorphous thin film formed therein is disposed, the stage being movable along an X-axis direction and a Y-axis direction, and a tilt refractive lens configured to transform the laser beam having a cross-sectional area of a rectangle shape into a tilted laser beam having a cross-sectional area of a non-rectangular parallelogram shape and to irradiate the tilted laser beam perpendicular to the stage.


Find Patent Forward Citations

Seo, Jong-Oh. (2018). Laser crystallization apparatus and method of driving the same (U.S. Patent No. 10050067). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10050067

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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