The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 14, 2018

Filed:

May. 10, 2017
Applicant:

Semiconductor Energy Laboratory Co., Ltd., Atsugi-shi, Kanagawa-ken, JP;

Inventors:

Hidekazu Miyairi, Kanagawa, JP;

Yuichi Sato, Kanagawa, JP;

Yuji Asano, Kanagawa, JP;

Tetsunori Maruyama, Kanagawa, JP;

Tatsuya Onuki, Kanagawa, JP;

Shuhei Nagatsuka, Kanagawa, JP;

Assignee:

Semiconductor Energy Laboratory Co., Ltd., Atsugi-shi, Kanagawa-ken, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/12 (2006.01); H01L 29/78 (2006.01); H01L 23/48 (2006.01); H01L 23/485 (2006.01); H01L 23/522 (2006.01); H01L 23/532 (2006.01); H01L 27/06 (2006.01); H01L 29/786 (2006.01); H01L 21/768 (2006.01); H01L 21/8258 (2006.01);
U.S. Cl.
CPC ...
H01L 27/1225 (2013.01); H01L 21/76807 (2013.01); H01L 21/76826 (2013.01); H01L 21/76829 (2013.01); H01L 21/76831 (2013.01); H01L 21/8258 (2013.01); H01L 23/481 (2013.01); H01L 23/485 (2013.01); H01L 23/5223 (2013.01); H01L 23/53238 (2013.01); H01L 23/53295 (2013.01); H01L 27/0688 (2013.01); H01L 27/124 (2013.01); H01L 29/7869 (2013.01); H01L 29/78603 (2013.01);
Abstract

To provide a semiconductor device with excellent electrical characteristics or a semiconductor device with stable electrical characteristics. A semiconductor device includes a first transistor, a second transistor, a first insulator, a second insulator, a first wiring, and a first plug. The first transistor includes silicon. The second transistor includes an oxide semiconductor. The first insulator is located over the first transistor. The second insulator is located over the first insulator. The second transistor is located over the second insulator. The first wiring is located over the second insulator and the first plug. The first transistor and the second transistor are electrically connected to each other through the first wiring and the first plug. The first wiring has low hydrogen permeability. The hydrogen permeability of the second insulator is lower than the hydrogen permeability of the first insulator.


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