The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 14, 2018

Filed:

Feb. 05, 2016
Applicant:

Hitachi High-tech Science Corporation, Minato-ku, Tokyo, JP;

Inventors:

Keiichi Tanaka, Tokyo, JP;

Kazuo Chinone, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 23/223 (2006.01); G01N 23/2252 (2018.01); H01L 39/10 (2006.01); H01L 39/16 (2006.01);
U.S. Cl.
CPC ...
G01N 23/2252 (2013.01); H01L 39/10 (2013.01); H01L 39/16 (2013.01); G01N 2223/3103 (2013.01);
Abstract

An X-ray analyzer includes: an excitation source for exciting a sample to radiate a characteristic X-ray; an X-ray detector that detects the characteristic X-ray; a collimator; at least one window that is provided between the sample and the X-ray detector and allows the characteristic X-ray to pass through; and a cooling unit that cools the window, wherein the window is laminated with one or more layer of an aluminum film and one or more layer of an insulating film, wherein a total thickness of the aluminum film of the at least one window is equal to or greater than 150 nm and is less than 300 nm, and wherein a size of the collimator is set such that a quantity of radiant heat to the X-ray detector of the atmospheric temperature when the window is not present is equal to or less than 10 μW.


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