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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10047046 B1

PDFFull Text
Date of Patent:
Aug. 14, 2018

Filed:

Feb. 27, 2017

Salt and photoresist composition containing the same

Applicant:

Sumitomo Chemical Company, Limited, Tokyo, JP;

Inventors:

Tatsuro Masuyama, Osaka, JP;

Natsuki Okada, Osaka, JP;

Koji Ichikawa, Osaka, JP;

Assignee:

SUMITOMO CHEMICAL COMPANY, LIMITED, Tokyo, JP;

Attorney:

Birch, Stewart, Kolasch & Birch, LLP

Primary Examiner:

Amanda C Walke

Int. Cl.
CPC ...
G03F 7/004 (2006.01); C07C 381/12 (2006.01); G03F 7/32 (2006.01); G03F 7/039 (2006.01); H01L 21/027 (2006.01); C07D 327/06 (2006.01); C07D 493/10 (2006.01); C07D 493/20 (2006.01); C08F 20/18 (2006.01); C08F 20/24 (2006.01); C08F 20/28 (2006.01); G03F 7/038 (2006.01); G03F 7/09 (2006.01); G03F 7/16 (2006.01); G03F 7/20 (2006.01); G03F 7/38 (2006.01); C07D 495/10 (2006.01); C07D 495/20 (2006.01);
U.S. Cl.
CPC ...
C07C 381/12 (2013.01); C07D 327/06 (2013.01); C07D 493/10 (2013.01); C07D 493/20 (2013.01); C07D 495/10 (2013.01); C07D 495/20 (2013.01); C08F 20/18 (2013.01); C08F 20/24 (2013.01); C08F 20/28 (2013.01); G03F 7/0045 (2013.01); G03F 7/0046 (2013.01); G03F 7/038 (2013.01); G03F 7/039 (2013.01); G03F 7/0397 (2013.01); G03F 7/091 (2013.01); G03F 7/162 (2013.01); G03F 7/168 (2013.01); G03F 7/2006 (2013.01); G03F 7/325 (2013.01); G03F 7/327 (2013.01); G03F 7/38 (2013.01); H01L 21/0274 (2013.01); H01L 21/0275 (2013.01); C08F 2800/10 (2013.01);
Abstract

A salt having a group represented by the formula (aa): wherein Xand Xindependently each represent an oxygen atom or a sulfur atom,the ring W represents a C3-C36 heterocyclic ring which has an ester bond or a thioester bond, said heterocyclic ring optionally further having an oxygen atom, a sulfur atom, a carbonyl group or a sulfonyl group each by which a methylene group has been replaced, and said heterocyclic ring optionally having a hydroxyl group, a cyano group, a carboxyl group, a C1-C12 alkyl group, a C1-C12 alkoxy group, a C2-C13 alkoxycarbonyl group, a C2-C13 acyl group, a C2-C13 acyloxy group, a C3-C12 alicyclic hydrocarbon group, a C6-C10 aromatic hydrocarbon group or any combination of these groups each by which a hydrogen atom has been replaced, and* represents a binding position.

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