The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 14, 2018
Filed:
Aug. 23, 2012
Applicants:
Akiyoshi Shibuya, Tokyo, JP;
Kenji Hata, Tsukuba, JP;
Motoo Yumura, Tsukuba, JP;
Inventors:
Assignees:
ZEON CORPORATION, Tokyo, JP;
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01); C01B 31/02 (2006.01); B01J 23/745 (2006.01); B82Y 30/00 (2011.01); B82Y 40/00 (2011.01); C23C 16/44 (2006.01); C23C 16/455 (2006.01); C01B 32/05 (2017.01); C01B 32/16 (2017.01);
U.S. Cl.
CPC ...
C01B 31/0226 (2013.01); B01J 23/745 (2013.01); B82Y 30/00 (2013.01); B82Y 40/00 (2013.01); C01B 32/05 (2017.08); C01B 32/16 (2017.08); C23C 16/4412 (2013.01); C23C 16/45578 (2013.01); C01B 2202/08 (2013.01); C01B 2202/30 (2013.01); C01B 2202/32 (2013.01);
Abstract
An apparatus of the present invention for producing an aligned carbon nanotube includes: at least one injection section including at least one injection hole from which a raw material gas is injected to a base substrate; an exhaust vent for exhausting the raw material gas; and an exhaust section including a plurality of exhaust vents, the plurality of exhaust vents being provided so as to be closer to the exhaust vent than a plurality of injection holes included in the at least one injection hole of the at least one injection section.