The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 07, 2018

Filed:

Jul. 23, 2015
Applicant:

University of Utah Research Foundation, Salt Lake City, UT (US);

Inventors:

Ling Zang, Salt Lake City, UT (US);

Benjamin R. Bunes, Salt Lake City, UT (US);

Assignee:

University of Utah Research Foundation, Salt Lake City, UT (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 27/00 (2006.01); H01L 21/336 (2006.01); H01L 21/00 (2006.01); H01L 51/05 (2006.01); H01L 51/00 (2006.01); G01N 27/414 (2006.01);
U.S. Cl.
CPC ...
H01L 51/0554 (2013.01); G01N 27/4141 (2013.01); H01L 51/001 (2013.01); H01L 51/0006 (2013.01); H01L 51/0022 (2013.01); H01L 51/0545 (2013.01); H01L 51/0558 (2013.01); H01L 51/0053 (2013.01);
Abstract

A chemical sensing field effect transistor device is disclosed. The device can include a control gate structure interfacing a control side of a semiconductor channel region, a source region, and a drain region. The control gate structure can comprise a control gate dielectric and a control gate electrode. The device can include a sensing gate structure interfacing the semiconductor channel region, the source region, and the drain region at a sensing side of the semiconductor channel region opposite the control gate structure. The sensing gate structure can comprise a sensing gate dielectric, and a sensing gate electrode. The device can include a functional layer interfacing the sensing gate electrode opposite the sensing gate dielectric. The functional layer can have an exposed interface surface. The functional layer can be capable of binding with a target analyte material sufficient to create a measurable change in conductivity across the semiconductor channel region.


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