The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 07, 2018

Filed:

Oct. 16, 2017
Applicant:

SK Hynix Inc., Icheon, KR;

Inventor:

Jong-Han Shin, Seoul, KR;

Assignee:

SK HYNIX INC., Icheon, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/08 (2006.01); H01L 29/423 (2006.01); H01L 27/22 (2006.01); H01L 27/24 (2006.01); H01L 29/66 (2006.01); H01L 21/3065 (2006.01); H01L 21/311 (2006.01); H01L 21/02 (2006.01); H01L 27/11507 (2017.01); G06F 12/0875 (2016.01); G06F 13/42 (2006.01); H01L 29/06 (2006.01); H01L 27/108 (2006.01); H01L 45/00 (2006.01); H01L 43/08 (2006.01); G11C 11/16 (2006.01); H01L 43/10 (2006.01);
U.S. Cl.
CPC ...
H01L 27/228 (2013.01); G06F 12/0875 (2013.01); G06F 13/4282 (2013.01); H01L 21/02532 (2013.01); H01L 21/3065 (2013.01); H01L 21/31116 (2013.01); H01L 27/11507 (2013.01); H01L 27/2436 (2013.01); H01L 27/2463 (2013.01); H01L 29/0649 (2013.01); H01L 29/0847 (2013.01); H01L 29/4236 (2013.01); H01L 29/66636 (2013.01); G11C 11/161 (2013.01); H01L 27/10811 (2013.01); H01L 27/10823 (2013.01); H01L 27/10876 (2013.01); H01L 43/08 (2013.01); H01L 43/10 (2013.01); H01L 45/1233 (2013.01);
Abstract

An electronic device includes a transistor. The transistor includes: a substrate including an active region that extends in a first direction; a gate structure disposed in the substrate and crossing the active region in a second direction that crosses the first direction; recesses disposed in the active region on two sides of the gate structure in the first direction, a center of a bottom surface of a first recess being more depressed in a third direction than two edges of the bottom surface along the first direction, the third direction being perpendicular to the first and second directions; an insulating layer disposed in the first recess; and a junction layer disposed over the insulating layer in the first recess in the third direction, a top surface of the insulating layer being below the two edges of the bottom surface and having a smaller curvature than the bottom surface.


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