The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 07, 2018
Filed:
Aug. 31, 2016
Tokyo Electron Limited, Minato-ku, JP;
Go Ayabe, Koshi, JP;
Kouji Takuma, Koshi, JP;
TOKYO ELECTRONICS LIMITED, Minato-ku, JP;
Abstract
A substrate processing apparatus includes a substrate processing device, a substrate accommodation-status detection device, a substrate-transport device including a first substrate-transport sub-device which unloads substrates from a carrier and a second substrate-transport sub-device which unloads the substrates from the carrier, a control device including processing circuitry which controls the first and second substrate-transport sub-devices based on detection result of the substrate accommodation-status detection device. The processing circuitry of the control device determines a selection, based on the result of the substrate accommodation-status detection device, between a process in which the processing circuitry of the control device simultaneously drives the first and second substrate-transport sub-devices such that the first and second substrate-transport sub-devices simultaneously unload the substrates from the carrier and a process in which the processing circuitry of the control device drives only the second substrate-transport sub-device such that only the second substrate-transport sub-device unloads the substrates from the carrier.