The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 07, 2018
Filed:
Mar. 03, 2015
Applicant:
Infineon Technologies Ag, Neubiberg, DE;
Inventor:
Manfred Engelhardt, Villach-Landskron, AT;
Assignee:
INFINEON TECHNOLOGIES AG, Neubiberg, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23F 1/00 (2006.01); H01L 21/306 (2006.01); H01J 37/32 (2006.01); H01L 21/3065 (2006.01); C23C 16/513 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32642 (2013.01); C23C 16/513 (2013.01); H01J 37/32009 (2013.01); H01J 37/32532 (2013.01); H01J 37/32651 (2013.01); H01J 37/32715 (2013.01); H01L 21/3065 (2013.01); H01J 2237/3322 (2013.01); H01J 2237/3343 (2013.01);
Abstract
In accordance with an embodiment of the present invention, a process tool includes a chuck configured to hold a substrate. The chuck is disposed in a chamber. The process tool further includes a shielding unit with a central opening. The shielding unit is disposed in the chamber over the chuck.