The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 07, 2018
Filed:
Sep. 25, 2014
Mitsubishi Electric Corporation, Tokyo, JP;
Sunao Aya, Tokyo, JP;
Mitsubishi Electric Corporation, Tokyo, JP;
Abstract
A vacuum is maintained inside a vacuum partition (). The whole of the solid packed container () is disposed inside the vacuum partition (). A heater () sublimates the aluminum chloride () packed in the solid packed container () to generate an aluminum chloride gas (). An arc chamber () ionizes the aluminum chloride gas () and emits an ion beam () of the ionized aluminum chloride gas (). A gas supply nozzle () leads the aluminum chloride gas () from the solid packed container () into the arc chamber (). A supporting part () supports and fixes the solid packed container () on the vacuum partition (). A thermal conductivity of the supporting part () is lower than thermal conductivities of the vacuum partition () and the solid packed container ().