The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 07, 2018
Filed:
Mar. 04, 2016
Ckd Corporation, Komaki-shi, Aichi, JP;
Nikon Corporation, Tokyo, JP;
Akihiro Ito, Komaki, JP;
Masayuki Kouketsu, Komaki, JP;
Shigeru Morimoto, Tokyo, JP;
Hiromitsu Yoshimoto, Tokyo, JP;
Koji Tanaka, Tokyo, JP;
CKD Corporation, Komaki-shi, Aichi, JP;
Nikon Corporation, Tokyo, JP;
Abstract
A cooling structure for a first electromagnetic coil includes the first electromagnetic coil having a space extending in the direction of a predetermined axis Z; a cooling member attached to an end surface, with respect to the direction of the predetermined axis Z, of the first electromagnetic coil and having a flow path for fluid internally formed; and an inlet pipe and an outlet pipe connected, within the space, to an inlet and outlet, respectively, of the flow path of the cooling member and extending through the space to a region outside the electromagnetic coil.