The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 07, 2018

Filed:

Apr. 18, 2016
Applicant:

U.s. Army Research Laboratory Attn: Rdrl-loc-i, Adelphi, MD (US);

Inventors:

Glen Richard Fox, Colorado Springs, CO (US);

Jeffrey S. Pulskamp, Fulton, MD (US);

Ronald G. Polcawich, Derwood, MD (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); G11C 11/22 (2006.01); G11C 11/50 (2006.01); G11C 23/00 (2006.01); H01L 41/09 (2006.01); H01H 57/00 (2006.01);
U.S. Cl.
CPC ...
G11C 11/221 (2013.01); G11C 11/22 (2013.01); G11C 11/50 (2013.01); G11C 23/00 (2013.01); H01L 41/094 (2013.01); H01H 2057/006 (2013.01);
Abstract

A ferroelectric mechanical memory structure comprising a substrate, a MEMS switch element movable between a first position and at least one second position, the MEMS switch element comprising first and second electrodes, a layer of ferroelectric material positioned between the first and second electrodes so that upon application of voltage between the first and second electrodes the MEMS switch element moves between the first position and the second position, and a switch contact which contacts the first electrode only when the MEMS switch element is in the first position, wherein the ferroelectric material is selected so that the remanent strain within the layer of ferroelectric material is controlled by the history of the voltage potential applied to the ferroelectric material by the first and second electrodes, and wherein the remanent strain is sufficient to retain the MEMS switch element in the first or second position upon removal of the voltage.


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