The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 07, 2018
Filed:
Oct. 23, 2013
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
James R. Moyne, Canton, MI (US);
Jimmy Iskandar, Fremont, CA (US);
Bradley D. Schulze, Phoenix, AZ (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06F 11/30 (2006.01); G21C 17/00 (2006.01); G05B 23/02 (2006.01); G05B 19/418 (2006.01);
U.S. Cl.
CPC ...
G05B 23/0272 (2013.01); G05B 19/4184 (2013.01); G05B 23/024 (2013.01); Y02P 90/14 (2015.11);
Abstract
Described herein are methods and systems for providing a user interface to indicate health of a tool in a manufacturing facility. A method may include receiving, via a user interface, user selection of fault detection data pertaining to a tool in a manufacturing facility, obtaining health abnormality indicators of the tool using the fault detection data, and presenting the health abnormality indicators of the tool in the user interface.