The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 07, 2018
Filed:
Jun. 06, 2014
Toshiba Mitsubishi-electric Industrial Systems Corporation, Chuo-ku, JP;
The University of Tokyo, Bunkyo-ku, JP;
Masaaki Furukawa, Tokyo, JP;
Kodai Ushiwata, Tokyo, JP;
Tetsuo Yoshimitsu, Tokyo, JP;
Yuichi Tsuboi, Tokyo, JP;
Kunihiko Hidaka, Tokyo, JP;
Akiko Kumada, Tokyo, JP;
Hisatoshi Ikeda, Tokyo, JP;
TOSHIBA MITSUBISHI-ELECTRIC INDUSTRIAL SYSTEMS CORPORATION, Chuo-ku, JP;
THE UNIVERSITY OF TOKYO, Bunkyo-ku, JP;
Abstract
A three-dimensional surface potential distribution measurement apparatus includes: a laser light source; a Pockels crystal; a mirror; a light detector; a support structure which supports the aforementioned elements while maintaining a relative positional relationship therebetween; a movement driver which can move the support structure three-dimensionally; a rotary driver which supports the test object and can rotate the test object about an axis extending in a longitudinal direction of the test object; and a drive controller which controls the movement driver and the rotary driver. The drive controller coordinates a driving operation by the movement driver and by the rotary driver while maintaining a gap between the second end face of the Pockels crystal and a surface of the test object at a predetermined value such that the second end face of the Pockels crystal approaches all the surfaces of the electric field reduction system on the test object.