The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 07, 2018
Filed:
Jul. 09, 2009
Hiroshi Nishihara, Kawasaki, JP;
Kazuhiko Fukutani, Yokohama, JP;
Takao Nakajima, Kawasaki, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
A measurement apparatus capable of measuring a position and a size of an absorber with high accuracy, which includes: a light source unit for emitting a pulse beam; an illumination optical unit for leading the pulse beam emitted by the light source unit to an inside of an inspection object; and an acoustic signal detection unit for detecting a photoacoustic signal generated by the pulse beam in which the illumination optical unit includes a first and second illumination optical units that are arranged so that the inspection object is irradiated with the pulse beam from both sides thereof opposingly; and the acoustic signal detection unit is provided so that a detection surface of the acoustic signal detection unit is positioned on the same side as that of one of irradiation surfaces of the inspection object which the first and second illumination optical units irradiate with the pulse beam.