The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 07, 2018
Filed:
Nov. 06, 2014
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventor:
Gangadhar Sheelavant, Karnataka, IN;
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01K 11/00 (2006.01); G01K 11/30 (2006.01); G01K 11/12 (2006.01); H01L 21/67 (2006.01); G01J 5/00 (2006.01); G01R 31/265 (2006.01); F27D 21/00 (2006.01);
U.S. Cl.
CPC ...
G01K 11/006 (2013.01); H01L 21/67248 (2013.01); F27D 21/0014 (2013.01); G01J 5/0003 (2013.01); G01K 11/12 (2013.01); G01K 11/30 (2013.01); G01R 31/2656 (2013.01);
Abstract
Methods and apparatuses for determining in-situ a temperature of a substrate with a thermal sensor in a vacuum chamber are described herein. In one embodiment a thermal sensor has a transmitter configured to transmit electromagnetic waves, a receiver configured to receive electromagnetic waves, and a controller configured to control the transmitter and receiver, wherein the controller determines a temperature from a difference between the transmitted electromagnetic wave and the received electromagnetic wave.