The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 07, 2018
Filed:
Mar. 21, 2016
Method for inspecting physical quantity sensor and method for manufacturing physical quantity sensor
Applicant:
Seiko Epson Corporation, Tokyo, JP;
Inventors:
Masahiro Oshio, Shiojiri, JP;
Kenji Sato, Matsumoto, JP;
Assignee:
SEIKO EPSON CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01C 25/00 (2006.01); G01C 19/5719 (2012.01); G01C 19/5726 (2012.01); G01C 19/5776 (2012.01);
U.S. Cl.
CPC ...
G01C 19/5719 (2013.01); G01C 19/5726 (2013.01); G01C 19/5776 (2013.01); G01C 25/005 (2013.01);
Abstract
A method for inspecting a physical quantity sensor includes: applying a test drive signal while changing a voltage level, to an angular velocity sensor as a physical quantity sensor having a detection portion which performs detection vibration according to a physical quantity; detecting an output signal from the detection portion corresponding to the test drive signal, as a test detection signal; and performing pass/fail determination based on a change in the test detection signal in relation to the change in the voltage level.