The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 07, 2018

Filed:

Jul. 07, 2015
Applicant:

Samsung Display Co., Ltd., Yongin, Gyeonggi-Do, KR;

Inventors:

Myungsoo Huh, Yongin, KR;

Dongkyun Ko, Yongin, KR;

Choelmin Jang, Yongin, KR;

Sungchul Kim, Yongin, KR;

Inkyo Kim, Yongin, KR;

Cheollae Roh, Yongin, KR;

Assignee:

Samsung Display Co., Ltd., Gyeonggi-do, KR;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 16/50 (2006.01); C23C 16/54 (2006.01); H01J 37/32 (2006.01); C23C 16/455 (2006.01); H01L 51/52 (2006.01);
U.S. Cl.
CPC ...
C23C 16/50 (2013.01); C23C 16/45563 (2013.01); C23C 16/54 (2013.01); H01J 37/3244 (2013.01); H01J 37/32449 (2013.01); H01J 37/32752 (2013.01); H01J 37/32899 (2013.01); H01L 51/5256 (2013.01);
Abstract

An apparatus and a method of manufacturing a display apparatus are disclosed. In one aspect, the apparatus includes a chamber and an inorganic layer forming nozzle unit formed in the chamber and configured to form at least one inorganic layer. The apparatus also includes an organic layer forming nozzle unit formed in the chamber and configured to form at least one organic layer, wherein the organic layer forming nozzle unit is arranged substantially in line with the inorganic layer forming nozzle unit. The apparatus further includes a separating nozzle unit formed between the inorganic layer forming nozzle unit and the organic layer forming nozzle unit and configured to spray an inert gas.


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