The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 31, 2018

Filed:

Jan. 05, 2018
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Suyog Gupta, White Plains, NY (US);

Bahman Hekmatshoartabari, White Plains, NY (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/3215 (2006.01); H01L 29/423 (2006.01); H01L 29/41 (2006.01); H01L 29/51 (2006.01); H01L 21/28 (2006.01); H01L 29/66 (2006.01); H01L 29/788 (2006.01);
U.S. Cl.
CPC ...
H01L 29/42324 (2013.01); H01L 21/28273 (2013.01); H01L 21/3215 (2013.01); H01L 29/413 (2013.01); H01L 29/51 (2013.01); H01L 29/66825 (2013.01); H01L 29/7883 (2013.01); H01L 29/4238 (2013.01); H01L 29/42368 (2013.01);
Abstract

A method includes forming a tunneling dielectric layer on a semiconductor substrate, a first portion of the tunneling dielectric layer is directly above a channel region in the semiconductor substrate and a second portion of the tunneling dielectric layer is directly above source-drain regions located on opposing sides of the channel region, the second portion of the tunneling dielectric layer is thicker than the first portion of the tunneling dielectric layer, forming a floating gate directly above the first portion of the tunneling dielectric layer and the second portion of the tunneling dielectric layer, and forming a control dielectric layer directly above the floating gate.


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