The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 31, 2018
Filed:
Oct. 13, 2014
Applicant:
Philips Lighting Holding B.v., Eindhoven, NL;
Inventors:
Assignee:
PHILIPS LIGHTING HOLDING B.V., Eindhoven, NL;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 21/88 (2006.01); H04N 5/225 (2006.01);
U.S. Cl.
CPC ...
G01N 21/8806 (2013.01); G01N 21/8803 (2013.01); H04N 5/225 (2013.01); G01N 2021/8809 (2013.01); G01N 2201/0633 (2013.01); G01N 2201/12 (2013.01);
Abstract
A defect inspection system is provided for inspection of defects in the surface of a sample. An array of light sources is used, with different light sources providing light to the sample from different directions. A main direction of illumination is defined with highest intensity, and this direction evolves over time. By providing varying directional illumination instead of blanket illumination, it becomes easier to detect defects.