The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 31, 2018
Filed:
Jul. 20, 2017
Toshiba Memory Corporation, Minato-ku, Tokyo, JP;
Hajime Nagano, Yokkaichi Mie, JP;
TOSHIBA MEMORY CORPORATION, Tokyo, JP;
Abstract
According to some embodiments, a semiconductor manufacturing apparatus includes a first boat and a second boat, each of the first boat and the second boat having two support rings respectively provided at a top end and a bottom end thereof and a plurality of pillars provided between the top support ring and bottom support ring and spaced apart from one another. The pillar is provided with support protrusions on which a semiconductor substrate can be placed, and vertical positions of upper surfaces of the support protrusions of the second boat are lower than positions of upper surfaces of the support protrusions of the first boat. The semiconductor apparatus is configured to lift the second boat such that the positions of the upper surfaces of the support protrusions provided in the second boat are positioned above the positions of the upper surfaces of the support protrusions provided in the first boat.