The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 31, 2018
Filed:
Mar. 15, 2017
Applicant:
Tdk Corporation, Tokyo, JP;
Inventors:
Hiroki Uchiyama, Tokyo, JP;
Raitarou Masaoka, Tokyo, JP;
Shohei Fujii, Tokyo, JP;
Maiko Shirokawa, Tokyo, JP;
Assignee:
TDK CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C04B 35/03 (2006.01); C01F 11/02 (2006.01); C01F 5/02 (2006.01); C04B 35/04 (2006.01); C04B 35/057 (2006.01); C04B 35/622 (2006.01); C23C 14/08 (2006.01); C23C 14/18 (2006.01); C23C 14/34 (2006.01); H01G 4/10 (2006.01); H01G 4/33 (2006.01); C04B 35/486 (2006.01); H01G 4/08 (2006.01); H01G 4/12 (2006.01); H01L 21/02 (2006.01); H01L 49/02 (2006.01);
U.S. Cl.
CPC ...
C01F 11/02 (2013.01); C01F 5/02 (2013.01); C04B 35/03 (2013.01); C04B 35/04 (2013.01); C04B 35/057 (2013.01); C04B 35/486 (2013.01); C04B 35/62218 (2013.01); C23C 14/082 (2013.01); C23C 14/185 (2013.01); C23C 14/3414 (2013.01); H01G 4/085 (2013.01); H01G 4/10 (2013.01); H01G 4/1227 (2013.01); H01G 4/33 (2013.01); H01L 21/02175 (2013.01); H01L 21/02194 (2013.01); H01L 21/02266 (2013.01); H01L 28/55 (2013.01); C01P 2002/74 (2013.01); C04B 2235/3205 (2013.01); C04B 2235/3206 (2013.01); C04B 2235/3208 (2013.01); C04B 2235/3213 (2013.01); C04B 2235/3215 (2013.01); C04B 2235/3236 (2013.01); C04B 2235/3239 (2013.01); C04B 2235/3244 (2013.01); C04B 2235/3248 (2013.01); C04B 2235/3255 (2013.01); C04B 2235/3284 (2013.01); C04B 2235/762 (2013.01);
Abstract
A dielectric film containing an alkaline earth metal oxide having a NaCl type crystal structure as a main component, wherein the dielectric film has a (111)-oriented columnar structure in a direction perpendicular to the surface of the dielectric film, and in a Cu—Kα X-ray diffraction chart of the dielectric film, a half width of the diffraction peak of (111) is in a range of from 0.3° to 2.0°.