The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 24, 2018
Filed:
Sep. 15, 2014
Applicant:
Analog Devices, Inc., Norwood, MA (US);
Inventors:
Guiti Zolfagharkhani, Brighton, MA (US);
Jan H. Kuypers, Rehau, DE;
Alexei Gaidarzhy, Brighton, MA (US);
Andrew Sparks, Cambridge, MA (US);
Assignee:
Analog Devices, Inc., Norwood, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01C 19/5684 (2012.01); H01L 41/047 (2006.01); G01C 19/5755 (2012.01); G01C 19/5712 (2012.01); H01L 41/053 (2006.01); H01L 41/08 (2006.01); H01L 41/107 (2006.01);
U.S. Cl.
CPC ...
H01L 41/047 (2013.01); G01C 19/5712 (2013.01); G01C 19/5755 (2013.01); H01L 41/053 (2013.01); H01L 41/081 (2013.01); H01L 41/107 (2013.01);
Abstract
In one embodiment, an apparatus includes a resonant structure having a plate, a drive electrode and a sense electrode. The resonant structure defines an axis substantially orthogonal to a plane defined by the plate when the resonant structure is not excited. The plate is formed from a piezoelectric material. The drive electrode is configured to excite the resonant structure, and the sense electrode is configured to sense a signal in response to rotation of the resonant structure about the axis.